Development of a SAW based Gyroscope

Oh, Hae-Kwan; Yun, Sung-Jin; Lee, Kee-Keun; Wang, Wen; Yang, Sang-Sik

Journal of the Korea Institute of Military Science and Technology 2009;12(1):106-113.

Hae-Kwan Oh, Sung-Jin Yun, Kee-Keun Lee, Wen Wang, Sang-Sik Yang

¹Ajou University
²

표면탄성파를 이용한 자이로스코프 개발

오해관, 윤성진, 이기근, 왕웬, 양상식

¹아주대학교
²국방과학연구소

Abstract

This paper presents a surface acoustic wave(SAW) micro-electro-mechanical-systems(MEMS) interdigital transducer (IDT) gyroscope with 80MHz central frequency on a $128^{circ};YX;LiNbO_3$, which is consisted of a two-port SAW resonator, metallic dots and dual delay lines for the sensor and reference oscillators. Reason for using two delay line oscillators is to extract the gyroscope effect by comparing the resonant frequencies between two oscillators and to compensate the temperature effect. Based on the coupling of modes(COM) simulation, an 80MHz two ports SAW resonator and dual delay line were fabricated and characterized by the network analyzer. Obtained sensitivity was $109Hz/deg{cdot}s^{-1}$ in the angular rate range of $0{sim}1000deg/s$. Good Linearity and superior directivity were observed.

Key Words: Coriolis Force, Surface Acoustic Wave, Self-Oscillation, SAW Oscillator, SAW Resonator