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Journal of the Korea Institute of Military Science and Technology 2002;5(3):120-124.
Development of Micro Turbine based on MEMS Technology
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MEMS 기술을 이용한 마이크로 터빈의 개발
전병선, 박건중, 민홍석, 김세준, 송성진, 주영창, 민경덕
1서울대학교 기계항공공학부
2서울대학교 재료공학부
Abstract
Microturbine refers to turbines on the scale of centimeters which can transmit power on the order of tens of Watts. Such devices can be used as propulsion or power generation devices for various military systems. An interdisciplinary team at Seoul National University has designed, and fabricated such a device, and this paper describes each phase. A commercial code has been used for design, and MEMS processes have been used for manufacturing. Finally, some preliminary test results are presented.
Key Words: Micro Power System, Micro Turbine, MEMS, DRIE, High Aspect Ratio, Bonding


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