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J. KIMS Technol > Volume 17(5); 2014 > Article
Journal of the Korea Institute of Military Science and Technology 2014;17(5):672-679.
DOI: https://doi.org/10.9766/KIMST.2014.17.5.672   
A Study on the Transmittance, Heat-Resistance, and Mechanical Properties of SiO2, TiO2 Anti-Reflective Single Layers Deposited on Sapphire Substrate by MOCVD
Gyu-In Shim, Hyengwoo Eom, Hyung Kang, Se-Young Choi
1Department of Advanced Materials Science and Engineering, Yonsei University
2The 4th Research and Development Institute, Agency for Defense Development
금속유기화학증착법으로 사파이어 기판에 증착된 단층 SiO2, TiO2 저반사막의 광 투과율, 내열성, 기계적 특성에 관한 연구
심규인, 엄형우, 강형, 최세영
1연세대학교 신소재공학과
2국방과학연구소 제4기술연구본부
Abstract
To improve sensing capability of infrared, heat-resistance and mechanical properties, the $SiO_2$ and $TiO_2$ anti-reflective layers were coated on sapphire substrate by MOCVD. The standard wavelength was 4,600nm, and the thickness of anti-reflective layers were 379 and 758nm in case of ${lambda}/4$ and ${lambda}/2$ of incident angle($65^{circ}$), respectively. The $SiO_2$ and $TiO_2$ anti-reflective layers were coated 12.6 and 9.7nm/min of deposition rates by increasing oxygen pressure to set the ideal refractive index of 1.283. In case of $SiO_2({lambda}/2)$ coating, the transmittance increased from 55.0 to 62.7%. The transmittance of $TiO_2({lambda}/2)$ anti-reflective layer also increased from 55.0 to 64.8%. The flexural strength of $SiO_2({lambda}/2)$ and $TiO_2({lambda}/2)$ layer coated sapphire increased from 337.8 to 362.9 and 371.8MPa, respectively. The flexural strength at $500^{circ}C$ of these materials also increased respectively to 304.5, 358.2MPa from 265.9MPa. From these results, we confirmed these materials can be used as transmission window of infrared light.
Key Words: Anti-Reflective Coating, Sapphire, Transmittance
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