| A Review of Ion Beam Technology |
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Tae-Ho Lee |
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KISTI |
| 이온빔 기술 리뷰 |
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이태호 |
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한국과학기술정보 연구원 ReSeat 프로그램 |
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| Abstract |
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In this paper, ion beam technology was investigated through the published papers. Ion beam technology is mainly used by the focused ion beams. There are two different types of application methods. One method is to remove the material from the substrate, the other one is to deposit the materials on the surface of the substrate or specimen. Based on the literature review there are 1.5 times more published research papers related to the deposition than those of the removal. |
| Key Words:
Ion Beam Milling, Ion Beam Deposition, Ion Beam Implantation, Ion Coating, Focused Ion Beam |
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